In this study, it is aimed to design an accelerometer sensor based on Micro Electro Mechanical System (MEMS) and to perform finite element analysis by COMSOL program.
MEMS devices are used in many fields of application in industry and scientific studies. Especially; They are the most critical parts used in missiles, planes, ships, submarines, and navigation systems. Today, it is used in the prevention of vibration systems in computers and digital cameras, image clarification, and activation of user sensitive systems. Looking at other uses, MEMS is of great importance in the industry.
Acceleration sensors, acceleration, vibration, and mechanical shock values are used to measure electromechanical elements. Acceleration sensors have different operating methods. Some acceleration sensors use the piezoelectric effect. The microscopic crystal structures they contain are stretched with acceleration force; this allows voltage to be generated. Another way is to detect the change in capacity. A capacitive effect occurs between two closely related microstructures and the capacitance value is revealed. When an acceleration is applied, the distance between the fixed electrode and the seismic electrode changes. As the distance changes, the capacitance changes, and the acceleration produces a proportional output. In this study, the design and analysis of the accelerometer sensor based on the capacitive effect have been made.
In this study, the design and analysis of the MEMS-based accelerometer sensor have been realized by the COMSOL program. As a result of the analyzes, maximum, and minimum displacement regions of the accelerometer were obtained.
Anahtar Kelimeler: MEMS, Accelerometer, COMSOL